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Figure 3-14. microwave motion sensor assembliesDigital camera sensor Schematic diagram of the proposed sensor.͑ color online ͒ ͑ a ͒ simplified sensor microfabrication process flow.
Frame structure and the sensor arrangement.
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Structure of the sensor: (a) overall appearance of the sensor; (bA front view of the micro-sensor’s sections defined according to the 17: micro-graph of the image sensor..
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